STATE-OF-THE-ART IN LARGE AREA INTEGRATION AND SCALABILITY TO ULSI

Authors
  1. Audet, D.
  2. Savaria, Y.
  3. Arel, N.
Corporate Authors
Ecole Polytechnique, Montreal QUE (CAN) Centre de Developpement Technologique;Chief of Research and Development, Ottawa ONT (CAN) Director of Research and Development Communications and Space
Abstract
Keywords
ULTRA LARGE SCALE INTEGRATION (ULSI);SCALABILITY;WAFER SCALE INTEGRATION (WSI);DEFECT TOLERANCE
Report Number
CDT-P1348 —
Date of publication
01 Dec 1993
Number of Pages
97
DSTKIM No
94-03280
CANDIS No
137142
Format(s):
Hardcopy;Originator's fiche received by DSIS

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