MgO MICROMACHINING FOR SUPERCONDUCTOR FOCAL PLAN ARRAYS

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Authors
  1. Alain, C.
  2. Ngo Phong,L.
  3. Shih, I.
Corporate Authors
Defence Research Establishment Valcartier, Valcartier QUE (CAN)
Abstract
The construction of superconductor focal planes for infrared or millimeter wave imaging requires that the substrate of superconductor films be micromachined into thermal isolation structures or horn cavities. Wet etching was used to create cavities in the MgO substrate of high Te BiPbSrCaCuO films. Processes for lithography of metal patterns on superconductor films were also devised. It was found that cavities with a wall angle of 55 - 60 degrees could be formed in (100) MgO using solutions of HN03:CH3C00H or H3PO4. The MgO normal etch rates of these solutions were found to be respectively 117 and 27 mu m/hr. Thermal evaporation and magnetron rf sputtering were used to prepare Au and Ag films on BiPbSrCaCuO and MgO; however, only the sputtered films showed adequate film adhesion. Electric contacts and dipoles made of Au or Ag could be created by wet etching in a solution of KI-I without apparent degradation of the superconductivity of BiPbSrCaCuO.
Keywords
Micromachining;Josephson detectors
Date of publication
30 Apr 1997
Number of Pages
10
Reprinted from
SPIE, vol 3061, 1997, p 974-982
DSTKIM No
97-04149
CANDIS No
505780
Format(s):
Hardcopy;Document Image stored on Optical Disk

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