MEMS-Based Light Valves for Ultra-High Resolution Projection Displays


  1. Picard, F.
  2. Campillo, C.
  3. Niall, K.K.
  4. Larouche, C.
  5. Jerominek, H.
Corporate Authors
Defence R&D Canada - Toronto, Toronto ONT (CAN);Institut National d’Optique, Quebec QC (CAN)
Ultra-high resolution projectors will improve the visual systems of military flight simulators dramatically. There are changes in aspect angle and aspect rate which fixed-wing fighter pilots can discriminate at long standoff distances, but which cannot be displayed with adequate resolution by the visual systems of contemporary flight simulators. At present the limit of display resolution is fixed by the capacity of the display's projector. The issue is being addressed by INO, DRDC, and their partners working toward the development of a new light-modulating micromirror MEMS (MicroElectroMechanical Systems). This unique device incorporates 25 Mum x 25 microbridges acting as flexible micromirrors. Each micromirror corresponds to one pixel of an image and is capable of modulating light intensity in analog fashion, with switching speeds in the range of 5 Mus. A linear array of micromirrors is combined with a scanning system, a microlaser light source and a Schlieren-type optical system to produce a 256 grey-level image. The result is a MOEMS (MicroOptoElectroMechanical Systems)-based system that can write thousands of image lines at a frame rate of 60 Hz. Finite-element analyses have been performed to describe mechanical properties of the micromirrors. Several examples will be given from both static and dynamic electromechanical simulation. The micromirror fabrication process will be summarized. TRUNCATED

Il y a un résumé en français ici.

Microelectromechanical systems;Light valve;Visual displays;High resolution projector;High resolution displays;MEMS (Micro-Electro-Mechanical System);Projection displays
Report Number
DRDC-TORONTO-TR-2002-141 — Technical Report
Date of publication
01 Dec 2002
Number of Pages

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