A Flexible Micromirror Linear Array for High-Resolution Projection Displays


  1. Picard, F.
  2. Campillo, C.
  3. Pope, T.D.
  4. Niall, K.K.
  5. Peppler, P.W.
  6. Larouche, C.
  7. Hubert Jerominek
Corporate Authors
Defence R&D Canada - Toronto, Toronto ONT (CAN)
Contemporary military flight simulators constrain pilot training, in that they display scene features with insufficient resolution. Air-to-air and air-to-ground targets are not projected in enough contrast and resolution for a pilot in training to perceive them at real world slant ranges. To resolve this training gap, simulator display geometries require the development of ultra-high resolution projectors with greater than 20 megapixel resolution at 60 Hz frame rate. A unique micromirror able to modulate light intensity in an analog fashion and with switching times shorter than 5 µs has been developed to address this need. When combined with a scanner, a microlaser and Schlieren optics, a linear array of these flexible micromirrors can display images exhibiting thousands of lines at a frame rate of 60 Hz. The approach selected for light modulation and the micromirror fabrication process flow is reviewed. Static and dynamic performances of these electrostatic MOEMS are described. Preliminary results following the integration of the described modulator into a prototype projector are reported. Developments toward a fully addressable 2000 x 1 flexible micromirror array are presented. The specifications and design of the CMOS circuit required to control this micromirror array are described. Packaging issues related to these large arrays are discussed.

Il y a un résumé en français ici.

Projection displays;Semiconductor devices;Flight simulation;High resolution projector;Solid state microlaser device;High resolution displays;MEMS (Micro-Electro-Mechanical System)
Report Number
DRDC-TORONTO-TR-2003-055 — Technical Report
Date of publication
19 Mar 2003
Number of Pages
Electronic Document(PDF);CD ROM

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