Smart uncooled IR sensor with wavelength selectivity – Fabrication progress report 2

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Authors
  1. Paradis, S.
  2. Baldengerger, G.
Corporate Authors
Defence R&D Canada - Valcartier, Valcartier QUE (CAN);Plasmionique Inc, Varennes Que (CAN)
Abstract
This is the second progress report on the fabrication of a prototype of a smart uncooled infrared sensor with wavelength selectivity in the longwave infrared (LWIR) band. The work discussed in this report was carried out under WBE 10cd07 from December 2009 to May 2010. During this six-month period, the acquisition of CAD software, DW2000 from Design Workshop, allowed the design of a new set of masks that satisfy all requirements for cascaded micro-photolithographic operations as encountered in high-density microbolometer matrix fabrication processes. The new set of masks includes two bolometer designs, namely the I-leg and L-leg types. Both designs allow the fabrication of a microbolometer with a pixel size of 50x50 µm. Concurrent with the design work, microfabrication was carried on and some challenges encountered were addressed and are reported in this memorandum.

Il y a un résumé en français ici.

Report Number
DRDC-VALCARTIER-TM-2010-240 — Technical Memorandum
Date of publication
01 Oct 2010
Number of Pages
66
DSTKIM No
CA034496
CANDIS No
533963
Format(s):
Electronic Document(PDF)

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