MEMS in Aircraft Engine Monitoring – A Humidity Sensor

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Authors
  1. El-Gamal, M.
Corporate Authors
Defence R&D Canada - Atlantic, Dartmouth NS (CAN);MEMS VISION INTERNATIONAL INC., BROSSARD, QC (CA)
Abstract
In order to fully understand and exploit MEMS technologies for engine condition monitoring applications, issues impeding the implementation of MEMS sensors on aircraft engines need to be addressed. This effort introduces the first step in such implementation process. It develops, characterizes and demonstrates the deployment of a MEMS-based humidity sensor in anticipation of further development of engine condition monitoring sensors (e.g. NOx that monitor the level of pollution). Two capacitive-type MEMS sensor prototypes were designed, developed and built. The results demonstrated a linear response to changes between 11% and 97% of relative humidity.

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Keywords
MEMS;engine monitoring;humidity sensing
Report Number
DRDC-ATLANTIC-CR-2011-069 — Contract Report
Date of publication
01 Jul 2011
Number of Pages
20
DSTKIM No
CA046321
CANDIS No
806707
Format(s):
Electronic Document(PDF)

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