DIFFICULTES INHERENTES A L'EMPLOI DE SONDES ELECTROSTATIQUES DANS UN PLASMA R.F. (FRENCH TEXT)

Authors
  1. Cantin, A.
  2. Gagne, R.R.J.
Corporate Authors
Defence Research Establishment Valcartier, Valcartier QUE (CAN)
Abstract
The behaviour of electrostatic probes in a radiofrequency-excited plasma has been studied. The present data illustrate the perturbing effect of a R.F. potential drop at the plasma-probe junction, on the I-V characteristics of the probe. An increase of the probe ion current is observed, and the electron temperatures deduced from such characteristics are too high by a factor ranging from 2 to 3. Improvements of the probe and its associated circuit minimize the R.F. potential drop at the plasma-probe junction. This permits valid I-V characteristics to be obtained, as shown by experimental results.
Report Number
REPR48/70 —
Date of publication
15 Apr 1970
Number of Pages
11
Reprinted from
Series 10 Vol 69B, p115-116, Sep 70, Series 10 Vol 66B, p193-201, Apr 70, NUOVO Cimento
DSTKIM No
71-01899
CANDIS No
8373
Format(s):
Hardcopy;Originator's fiche received by DSIS

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