QUANTITATIVE ELECTRON PROBE MICROANALYSIS USING A SCANNING ELECTRON MICROSCOPE AND AN X-RAY ENERGY SPECTROMETER

Authors
  1. Veinot, D.E.
Corporate Authors
Defence Research Establishment Atlantic, Dartmouth NS (CAN)
Abstract
A procedure was developed to utilize a scanning electron microscope and X-ray energy spectrometer to obtain quantitative elemental analysis. The precision and accuracy of an X-ray intensity ratio data processing technique has been evaluated. In general, the quantitative results obtained were accurate to better than plus or minus 1 percent of the certified elemental compositions of standard reference materials for all elements present at greater than 2 weight percent. Results were reproducible to better than 1 percent of the determined percentage compositions. Elements present at less than 0.1 weight percent composition and elements having atomic numbers less than 11 (sodium) were not detected.
Report Number
DREA-TM-80-A — Technical Memorandum
Date of publication
15 Apr 1980
Number of Pages
18
DSTKIM No
80-02209
CANDIS No
89895
Format(s):
Hardcopy;Originator's fiche received by DSIS

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